Accuracy and analysis of long-radius measurement with long trace profiler

作     者：叶海仙 杨李茗 

作者机构：Chengdu Fine Optical Engineering Research Center 

出 版 物：《Chinese Optics Letters》 (中国光学快报（英文版）)

年 卷 期：2011年第9卷第10期

页      面：76-78页

核心收录：

学科分类：0808[工学-电气工程] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0803[工学-光学工程] 0702[理学-物理学] 

基　　金：supported by the Two Hun-dreds Human Resource Foundation of China Academy of Engineering Physics 

主　　题：Least squares approximations Optical testing Trace analysis 

摘      要：The long trace profiler （LTP） is proposed to measure radius of curvature （R） and surface figure of a longradius spherical surface in an optical shop. Equipped with a motorized rotary stage and a two-dimensional tilt stage, the LTP scans the full aperture and calculates the absolute radius of curvature of each scanning line based on the least square method. Nonlinear error and manufacture error difference between center and the edge are obtained by comparing R results. The R-limit is validated and expressed as D/R, where D is the aperture of the mirror under test. A full-aperture three-dimensional figure is also reconstructed based on triangle interpolation.