Ultralow-loss compact silicon photonic waveguide spirals and delay lines

作     者：SHIHAN HONG LONG ZHANG YI WANG MING ZHANG YIWEI XIE DAOXIN DAI SHIHAN HONG;LONG ZHANG;YI WANG;MING ZHANG;YIWEI XIE;DAOXIN DAI

作者机构：State Key Laboratory for Modern Optical InstrumentationCenter for Optical&Electromagnetic ResearchCollege of Optical Science and EngineeringInternational Research Center for Advanced PhotonicsZhejiang UniversityZijingang CampusHangzhou 310058China Ningbo Research InstituteZhejiang UniversityNingbo 315100China 

出 版 物：《Photonics Research》 (光子学研究（英文版）)

年 卷 期：2022年第10卷第1期

页      面：1-7页

核心收录：

学科分类：070207[理学-光学] 07[理学] 0804[工学-仪器科学与技术] 0702[理学-物理学] 

基　　金：National Major Research and Development Program (2018YFB2200200, 2018YFB2200201) National Science Fund for Distinguished Young Scholars (61725503) National Natural Science Foundation of China(61961146003, 91950205) Zhejiang Provincial Major Research and Development Program (2021C01199) Zhejiang Provincial Natural Science Foundation(LD19F050001, LZ18F050001) Fundamental Research Funds for the Central Universities 

主　　题：waveguide tunable delay 

摘      要：Low-loss and compact optical waveguides are key for realizing various photonic integrated circuits with long onchip delay lines,such as tunable optical delay lines,optical coherence tomography,and optical *** this paper,a low-loss and compact silicon photonic waveguide spiral is proposed by introducing broadened Archimedean spiral waveguides with a tapered Euler S-bend.A 100-cm-long waveguide spiral is realized with a minimal bending radius as small as 10 μm by using a standard 220-nm-thick silicon-on-insulator foundry process,and the measured propagation loss is as low as 0.28 dB/***,the present waveguide spirals are used to realize a 10-bit tunable optical delay line,which has a footprint as small as 2.2 mm × 5.9 mm and a dynamic range of 5120 ps with a fine resolution of 10 ps.