Power characteristics of multiple inductively coupled RF discharges inside a metallic chamber
Power characteristics of multiple inductively coupled RF discharges inside a metallic chamber作者机构：Department of Surface EngineeringJozef Stefan InstituteJamova cesta 391000 LjubljanaSlovenia Jozef Stefan International Postgraduate SchoolJamova cesta 391000 LjubljanaSlovenia Plasmadis Ltd.Teslova ulica 301000 LjubljanaSloven
出 版 物：《Plasma Science and Technology》 (等离子体科学和技术（英文版）)
年 卷 期：2022年第24卷第1期
页 面：70-76页
核心收录：
学科分类：07[理学] 070204[理学-等离子体物理] 0702[理学-物理学]
基 金：funded by the Slovenian Research Agency,project No.L2-9235(Innovative configuration of inductively coupled gaseous plasma sources for up-scaling to industrialsize reactors) core funding P2-0082(thin-film structures and plasma surface engineering)
主 题：inductively coupled plasma large-area plasma E-to H-mode transition high power
摘 要：The characteristics of an innovative configuration of multiple radiofrequency(RF)coils immersed in a large metallic chamber are ***-cooled copper coils were mounted within the slits of double-walled glass tubes,which were immersed into a stainless-steel *** coils were connected in parallel to a gamma-type matching network,powered by an RF generator operating at industrial *** leads enabled optimisation of the line impedances and thus uniformly distributed RF power across the four *** from E-to H-mode and vice versa were measured for all coils at various oxygen pressures between 5 and 25 Pa.A uniform plasma was sustained in H-mode at the absorbed power threshold,which increased monotonously with increasing pressure in the metallic *** coils exhibit the same E-to H-mode transition hysteresis and need the same amount of power for transitioning from E-to *** setup enables maintaining uniform plasma in virtually any number of coils at high power without the risk of arcing and without the dead volume typical for a classical configuration with coils mounted outside the metallic chamber.
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