Selective growth of carbon nanotube on silicon substrates

作     者：邹小平 H.ABE T.SHIMIZU A.ANDO H.TOKUMOTO 朱申敏 周豪慎 

作者机构：Research Center for Sensor TechnologyBeijing Information Technology InstituteBeijing 100101China Beijing Key Laboratory for SensorBeijing 100101China Nanotechnology Research InstituteNational Institute of Advanced Industrial Science and Technology1-1-1 HigashiTsukubaIbalaki 305-8562Japan Energy Electronics Research InstituteNational Institute of Advanced Industrial Science and Technology1-1-1 UmezonoTsukubaIbalaki 305-8568Japan Nano-electronics Research InstituteNational Institute of Advanced Industrial Science and Technology1-1-1 UmezonoTsukubaIbalaki 305-8568Japan Nanotechnology Research CenterResearch Institute for Electronic ScienceHokkaido UniversitySapporo 001-0021Japan 

出 版 物：《中国有色金属学会会刊：英文版》 (Transactions of Nonferrous Metals Society of China)

年 卷 期：2006年第16卷第B01期

页      面：377-380页

核心收录：

学科分类：07[理学] 070205[理学-凝聚态物理] 08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0702[理学-物理学] 

基　　金：Project(KM200510772013) supported by the Beijing City Education Committee Science and Technology Development Program Project( 2005?2007) supported by the Academic Innovative Team Program(Novel Sensor & Materials: Nanodevice & Nanomaterials) of Education Committee of Beijing City 

主　　题：carbon nanotubes silicon substrate STCVD trench-patterned locally-ordered pattern 

摘      要：The carbon nanotube (CNT) growth of iron oxide-deposited trench-patterns and the locally-ordered CNT arrays on silicon substrate were achieved by simple thermal chemical vapor deposition(STCVD) of ethanol vapor. The CNTs were uniformly synthesized with good selectivity on trench-patterned silicon substrates. This fabrication process is compatible with currently used semiconductor-processing technologies, and the carbon-nanotube fabrication process can be widely applied for the development of electronic devices using carbon-nanotube field emitters as cold cathodes and can revolutionize the area of field-emitting electronic devices. The site-selective growth of CNT from an iron oxide nanoparticle catalyst patterned were also achieved by drying-mediated self-assembly technique. The present method offers a simple and cost-effective method to grow carbon nanotubes with self-assembled patterns.