Chip-scale optical airflow sensor

作     者：Yumeng Luo Xiaoshuai An Liang Chen Kwai Hei Li 

作者机构：School of MicroelectronicsSouthern University of Science and TechnologyShenzhen 518055China Engineering Research Center of Integrated Circuits for Next-Generation CommunicationsMinistry of EducationSouthern University of Science and TechnologyShenzhen 518055China Engineering Research Center of Three Dimensional Integration in Guangdong ProvinceSouthern University of Science and TechnologyShenzhen 518055China 

出 版 物：《Microsystems & Nanoengineering》 (微系统与纳米工程（英文）)

年 卷 期：2022年第8卷第1期

页      面：51-58页

核心收录：

学科分类：0808[工学-电气工程] 0809[工学-电子科学与技术（可授工学、理学学位）] 0817[工学-化学工程与技术] 080202[工学-机械电子工程] 08[工学] 0807[工学-动力工程及工程热物理] 0805[工学-材料科学与工程（可授工学、理学学位）] 0802[工学-机械工程] 0811[工学-控制科学与工程] 0702[理学-物理学] 

基　　金：The authors acknowledge financial support from the National Natural Science Foundation of China(62004088 and 12074170) the Shenzhen Natural Science Foundation Stability Support Program Project(20200925160044004) NSQKJJ(K21799120) 

主　　题：optical sensor reflectance 

摘      要：Airflow sensors are an essential component in a wide range of industrial,biomedical,and environmental *** development of compact devices with a fast response and wide measurement range capable of in situ airflow monitoring is highly ***,we report a miniaturized optical airflow sensor based on a GaN chip with a flexible PDMS *** compact GaN chip is responsible for light emission and *** PDMS membrane fabricated using a droplet-based molding process can effectively transform the airflow stimuli into optical reflectance changes that can be monitored by an on-chip *** the use of external components for light coupling,the proposed sensor adopting the novel integration scheme is capable of detecting airflow rates of up to 53.5 ms^(-1)and exhibits a fast response time of 12 ms,holding great promise for diverse practical *** potential use in monitoring human breathing is also demonstrated.