A novel multifunctional electronic calibration kit integrated by MEMS SPDT switches

作     者：Shan-Shan Wang Qian-Nan Wu Yue-Sheng Gao Jian-Gang Yu Qian-Long Cao Lu-Lu Han Meng-Wei Li 王姗姗;吴倩楠;高跃升;余建刚;曹钎龙;韩路路;李孟委

作者机构：School of Instrument and ElectronicsNorth University of ChinaTaiyuan 030051China Nantong Institute of Intelligent Opto-MechatronicsNorth University of ChinaNantong 226000China Center for Microsystem IntergrationNorth University of ChinaTaiyuan 030051China Academy for Advanced Interdisciplinary ResearchNorth University of ChinaTaiyuan 030051China School of ScienceNorth University of ChinaTaiyuan 030051China 

出 版 物：《Chinese Physics B》 (中国物理B（英文版）)

年 卷 期：2021年第30卷第11期

页      面：644-649页

核心收录：

学科分类：080904[工学-电磁场与微波技术] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 

基　　金：Project supported by the National Defense Technology Industry Strong,China (Grant No. JCKY2018408B006) the Information System New Items Project,China (Grant Nos. 2018XW0026 and 2019XW0010) the Information System Pre-research Project,China (Grant No. 31513060101) 

主　　题：microelectromechanical system(MEMS) electronic calibration kit single-pole double-throw(SPDT)switch short-open-load-through(SOLT)calibration 

摘      要：Design and simulation results of a novel multifunctional electronic calibration kit based on microelectromechanical system(MEMS)single-pole double-throw(SPDT)switches are presented in this *** short-open-load-through(SOLT)calibration states can be completed simultaneously by using the MEMS electronic calibration,and the electronic calibrator can be reused 10^(6) *** simulation results show that this novel electronic calibration can be used in a frequency range of 0.1 GHz–20 GHz,the return loss is less than 0.18 dB and 0.035 dB in short-circuit and open-circuit states,respectively,and the insertion loss in through(thru)state is less than 0.27 *** the other hand,the size of this novel calibration kit is only 6 mm×2.8 mm×0.8 *** results demonstrate that the calibrator with integrated radiofrequency microelectromechanical system(RF MEMS)switches can not only provide reduced size,loss,and calibration cost compared with traditional calibration kit but also improves the calibration accuracy and *** has great potential applications in millimeter-wave measurement and testing technologies,such as device testing,vector network analyzers,and RF probe stations.