A COMBINATORIAL APPROACH TO THE OXIDATION RESISTANCE OF (Ti,Al)N AND Ti-Al-Si-N HARD COATINGS

作     者：R. Cremer D. Neuschutz 

作者机构：RWTH Aachen Aachen D-52056 Germany 

出 版 物：《Acta Metallurgica Sinica(English Letters)》 (金属学报（英文版）)

年 卷 期：2002年第15卷第1期

页      面：6-14页

核心收录：

学科分类：080503[工学-材料加工工程] 08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 

基　　金：The financial support is granted by the Deutsche Forschungsgemeinschaft  Collabo-rative Research Center 289. "Forming of metals in the semi solid state and their properties" is gratefully acknowledged 

主　　题：combinatorial chemistry hard coating PVD magnetron sputtering 

摘      要：The increasing complexity of modern functional materials leads to the demandof a cost efficient tool for the development of new products. One possible approach to this questionis the adaptation of combinatorial methods to the specific requirements of materials *** methods, originally developed for the pharmaceutical industry, have recently been applied tothe screening of superconductive, magnetoresistant and photoluminescent materials. The principle ofthese combinatorial approaches is the deposition of large materials libraries in one processcombined with fast methods for the determination of the resulting properties. In this paper, thedeposition and characterization of laterally graded materials libraries (composition spread) ispresented. The films have been deposited by reactive magnetron sputtering, using two or threemetallic targets at a low angle to the substrate surface as well as a system of apertures. Toillustrate the advantages of combinatorial approaches for the development of advanced materials, themulticomponent metastable hardcoatings (Ti,Al)N and Ti-Al-Si-N are discussed with special emphasison the relations between structure and composition on the one hand and the oxidation resistance ofthese coatings on the other. The results illustrate that the composition spread approach is apowerful and cost efficient tool for the development and optimization of new multicomponentfunctional materials.