Second Order Fluid Glow Discharge Model Sustained by Different Source Terms
Second Order Fluid Glow Discharge Model Sustained by Different Source Terms作者机构:Institute of Maintenance and Industrial SecurityUniversity of Oran Electrical Engineering DepartmentOran University of Sciences and Technology
出 版 物:《Plasma Science and Technology》 (等离子体科学和技术(英文版))
年 卷 期:2011年第13卷第5期
页 面:583-590页
核心收录:
学科分类:080901[工学-物理电子学] 0809[工学-电子科学与技术(可授工学、理学学位)] 08[工学]
主 题:glow discharge Boltzmann equation Poisson equation electron temperature
摘 要:Behavior of charged particles in a DC low pressure glow discharge is studied. The electric properties of the glow discharge in argon, maintained by a constant source term with uni- form electron and ion generation, between two plane electrodes or by secondary electron emission at the cathode, are determined. A fluid model is used to solve self-consistently the first three moments of the Boltzmann equation coupled with the Poisson equation. The stationary spatial distribution of the electron and ion densities, the electric potential, the electric field, and the electron energy, in a two-dimensional (2D) configuration, are presented.