Crystal Structure during Film Formation

作     者：Guoping DU Hui SHEN Lanping YUE Weiguo YAO Zongquan LI and Zhenzhong QI (Institute of Solid State Physics, Academia Sinica, Hefei, 230031, China)(To whom correspondence should be addressed) 

作者机构：Acad Sinica Hefei China 

出 版 物：《Journal of Materials Science & Technology》 (材料科学技术（英文版）)

年 卷 期：1994年第10卷第2期

页      面：117-120页

核心收录：

学科分类：07[理学] 0817[工学-化学工程与技术] 0806[工学-冶金工程] 070205[理学-凝聚态物理] 08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0703[理学-化学] 0802[工学-机械工程] 0801[工学-力学（可授工学、理学学位）] 0702[理学-物理学] 

主　　题：NaCl Crystal Structure during Film Formation nm 

摘      要：For evaporation-deposited Ti films, face-centred cubic structure was observed at the initial stage of film growth, then transited to the hexagonal close-packed structure during film growing (less than 50 nm thick). While. for ion-beam sputter-deposited films. the structure of films always kept the fcc structure during all stages of film formation. The structure of film at initial growth stages relates with the substrate. It is discussed that different film processes and different growth stages provide different thermodynamic condition of film formation and result in the different crystal structures of films during the film formation