Real-time displacement measurement with large range and high accuracy using sinusoidal phase modulating laser diode interferometer

作     者：何国田 王向朝 曾爱军 唐锋 黄炳杰 

作者机构：Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Sciences Shanghai Hengyi Optics & Fine Mechanics Co. Ltd. 

出 版 物：《Chinese Optics Letters》 (中国光学快报（英文版）)

年 卷 期：2007年第5卷第4期

页      面：211-214页

核心收录：

学科分类：080901[工学-物理电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 080401[工学-精密仪器及机械] 0804[工学-仪器科学与技术] 0803[工学-光学工程] 

基　　金：This work was supported by the National Natural Science Foundation of China (No.60578051) the Science and Technology Committee of Shanghai (No.051107085 and 06QB14047) 

主　　题：Algorithms Interferometers Semiconductor lasers 

摘      要：To resolve the conflict of large measurement range and high accuracy in the existing real-time displacement measurement laser diode （LD） interferometers, a novel real-time displacement measurement LD interferometry is proposed and its measurement principle is analyzed. By use of a new phase demodulation algorithm and a new phase compensation algorithm of real-time phase unwrapping, the measurement accuracy is improved, and the measurement range is enlarged to a few wavelengths. In experiments, the peak-to-peak amplitude of the speaker vibration was 2361.7 nm, and the repeatability was 2.56 nm. The measurement time was less than 26 us.