ELECTRON BEAM OPTICS CALCULATIONS FOR ROTATIONALLY SYMMETRIC SYSTEMS POSSESSING THIRD ORDER ABERRATIONS
ELECTRON BEAM OPTICS CALCULATIONS FOR ROTATIONALLY SYMMETRIC SYSTEMS POSSESSING THIRD ORDER ABERRATIONS作者机构:Department of Radio-Electronics Peking University Beijing
出 版 物:《Journal of Electronics(China)》 (电子科学学刊(英文版))
年 卷 期:1993年第10卷第4期
页 面:331-343页
学科分类:070208[理学-无线电物理] 07[理学] 0702[理学-物理学]
主 题:conserved optics tracing BEAM Runge immersion Kutta aberration verify faster
摘 要:Based on theory of electron beam optics,the beam optical calculations for animmersion lens and a unipotential lens have been *** computational results showthat the beam optical calculations are consistent to the ray tracing and that the beam emittanceis conserved,even if the third order aberrations exist.