Experimental Setup for the Investigation of Reproducibility of Novel Tool Changing Systems in Nanofabrication Machines

作     者：Florian Weigert Roman Hebenstreit Roland FuBl Rene Theska Florian Weigert;Roman Hebenstreit;Roland Fü?l;René Theska

作者机构：Institute for Design and Precision EngineeringPrecision Engineering GroupTechnische Universitat IlmenauGustav-Kirchhoff-Platz.298693 IlmenauGermany Institute for Process Measurement and Sensor TechnologyTechnische Universitat IlmenauGustav-Kirchhoff-Str.198693 IlmenauGermany 

出 版 物：《Nanomanufacturing and Metrology》 (纳米制造与计量（英文）)

年 卷 期：2021年第4卷第3期

页      面：181-189页

核心收录：

学科分类：0817[工学-化学工程与技术] 08[工学] 0807[工学-动力工程及工程热物理] 0805[工学-材料科学与工程（可授工学、理学学位）] 0802[工学-机械工程] 0811[工学-控制科学与工程] 0801[工学-力学（可授工学、理学学位）] 0812[工学-计算机科学与技术（可授工学、理学学位）] 

基　　金：the support by the Deutsche Forschungsgemeinschaft(DFG)in the framework of Research Training Group"Tip-and laser-based 3D-Nanofabrication inextended macroscopic working areas"(GRK 2182)at the Technische Universiat Ilmenau Germany 

主　　题：Tool changing Kinematic coupling Measurement setup Uncertainty analysis Precision design 

摘      要：Nanomeasuring machines developed at the Technische Universitat Ilmenau enable three-dimensional measurements and manufacturing processes with the lowest *** to the requirements for these processes,a highly reproducible and long-term stable tool changing system is *** this purpose,kinematically determined couplings are widely *** state-of-the-art investigations on those are not sufficient for the highest demands on the reproducibility required for this application.A theoretical determination of the reproducibility based on analytical or numerical methods is possible,however not in the desired nanometer *** to this,a measurement setup for the determination of the reproducibility in five degrees of freedom with nanometer uncertainty was ***,potential measuring devices are systematically examined and measurement principles were developed out of this.A three-dimensional vector-based uncertainty analysis is performed to prove the feasibility of the measurement principle and provides a basis for further *** a result,a transla-tory measurement uncertainty of 10 nm and a rotatory uncertainty of 11 nrad can be ***,the measurement setup is designed,focusing on the metrological frame and the lift-off *** developed setup exceeds the uncertainties of the measurement setups presented in the state-of-the-art by an order of magnitude,allowing new in-depth investigations of the reproducibility of kinematic couplings.