Insights into the nucleation,grain growth and phase transformation behaviours of sputtered metastableβ-W films

作     者：Shuqun Chen Jinshu Wang Ronghai Wu Zheng Wang Yangzhong Li Yiwen Lu Wenyuan Zhou Peng Hua Hongyi Lia Shuqun Chen;Jinshu Wang;Ronghai Wu;Zheng Wang;Yangzhong Li;Yiwen Lu;Wenyuan Zhou;Peng Hu;Hongyi Li

作者机构：Key Laboratory of Advanced Functional MaterialsEducation Ministry of ChinaFaculty of Materials and ManufacturingBeijing University of TechnologyBeijing 100124China School of MechanicsCivil Engineering and ArchitectureNorthwestern Polytechnical UniversityXi’an 710129China High Performance Computing DepartmentNational Supercomputing Center in ShenzhenShenzhen 518055China China Ship Development and Design CenterWuhan 430074China 

出 版 物：《Journal of Materials Science & Technology》 (材料科学技术（英文版）)

年 卷 期：2021年第90卷第31期

页      面：66-75页

核心收录：

学科分类：07[理学] 070205[理学-凝聚态物理] 08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0702[理学-物理学] 

基　　金：financially supported by the National Natural Science Foundation of China(Nos.51904015 and 51534009) the General Program of Science and Technology Development Project of Beijing Municipal Education Commission(No.KM202010005008) the National Natural Science Fund for Innovative Research Groups(No.51621003) the Beijing Municipal Great Wall Scholar Training Plan Project(No.CIT&TCD20190307) 

主　　题：Metastable phases Tungsten Nucleation and growth Phase field modelling Phase transformation 

摘      要：Metastable phase in tungsten film is of great interests in recent years due to its giant spin Hall effects,however,little information has been known on its nucleation,growth and phase *** this paper,a 900 nm-thick tungsten film with double-layer structure(α-W underlayer andβ-W above it)was produced on SiO_(2)/Si substrate by high vacuum magnetron sputtering at room *** structural properties ofβ-W were systemically investigated by X-ray diffraction,transmission electron microscopy,thermodynamic calculation,first-principle and phase-field *** is found that theβ-W nucleation is energetically favoured on the SiO_(2)surface compared to theα-W *** the film thickening proceeds,β-W[211]turns to be preferred direction of growth owing to the elastic strain energy minimization,which is verified by phase-field ***,theβ→αphase transformation takes place near the film-substrate interface while the rest of the film keeps theβ-W phase,leading to a doublelayer *** localized phase transition is induced by lower Gibbs free energy ofα-W phase at larger grain sizes,which can be confirmed by thermodynamic *** in-situ heating TEM analysis of the as-deposited film reveals that theβ→αphase transformation is fulfilled byα/βinterface propagation rather than local atomic *** findings offer valuable insights into the intrinsic properties of metastable phase in tungsten.