Laser direct writing and characterizations of flexible piezoresistive sensors with microstructures

作     者：Chenying Zhang Wei Zhou Da Geng Cheng Bai Weida Li Songyue Chen Tao Luo Lifeng Qin Yu Xie Chenying Zhang;Wei Zhou;Da Geng;Cheng Bai;Weida Li;Songyue Chen;Tao Luo;Lifeng Qin;Yu Xie

作者机构：Department of Mechanical&Electrical EngineeringXiamen UniversityXiamen 361101China College of Information Science and EngineeringNortheastern UniversityShenyang 110004China 

出 版 物：《Opto-Electronic Advances》 (光电进展（英文）)

年 卷 期：2021年第4卷第4期

页      面：16-26页

核心收录：

学科分类：0808[工学-电气工程] 0809[工学-电子科学与技术（可授工学、理学学位）] 0817[工学-化学工程与技术] 080202[工学-机械电子工程] 08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0802[工学-机械工程] 0702[理学-物理学] 

基　　金：supported by the National Natural Science Foundation of China(No.51922092,No.51705439) Domain Foundation of Equipment Advance Research of 13th Five-year Plan(JZX7Y20190243000801) the Natural Science Foundation of Fujian Province of China(No.2017J06015) Science and Technology Plan Project of Xiamen City(No.3502Z20173024) 

主　　题：flexible pressure sensor piezoresistive sensor microstructure laser processing 

摘      要：Functional materials with high viscosity and solid materials have received more and more attentions in flexible pressure sensors,which are inadequate in the most used molding ***,laser direct writing(LDW)method is proposed to fabricate flexible piezoresistive sensors with microstructures on PDMS/MWCNTs composites with an 8%MWCNTs mass *** controlling laser energy,microstructures with different geometries can be obtained,which significantly impacts the performances of the ***,curved microcones with excellent performance are fabricated under parameters of f=40 kHz and v=150 mm·s^(-1).The sensor exhibits continuous multi-linear sensitivity,ultrahigh original sensitivity of 21.80%kPa^(-1),wide detection range of over 20 kPa,response/recovery time of~100 ms and good cycle stability for more than 1000 ***,obvious resistance variation can be observed when tiny pressure(a peanut of 30 Pa)is ***,the flexible piezoresistive sensor can be applied for LED brightness controlling,pulse detection and voice recognition.