Additive Manufacturing of Metal Micro-ring and Tube by Laser-Assisted Electrophoretic Deposition with Laguerre-Gaussian Beam
作者机构：Graduate School of Integrated Science and TechnologyShizuoka University3-5-1 Johoku.Naka-kuHamamatsu 432-8561.Japan Graduate School of Medical PhotonicsShizuoka University3-5-1 JohokuNaka-kuHamamatsu 432-8011Japan Research Institute of ElectronicsShizuoka University3-5-1 JohokuNaka-kuHamamatsu 432-8011Japan
出 版 物：《Nanomanufacturing and Metrology》 (纳米制造与计量（英文）)
年 卷 期：2021年第4卷第4期
页 面：271-277页
核心收录：
学科分类：080901[工学-物理电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 080401[工学-精密仪器及机械] 0804[工学-仪器科学与技术] 0803[工学-光学工程]
基 金：This study was supported by JSPS KAKENHI Grant Number JP20H0244 from the Ministry of Education Culture Sports Science and Technology of Japan
主 题：Additive manufacturing Laguerre-Gaussian beam Laser trapping Maskless fabrication Electrophoretic deposition
摘 要：We report a method for laser-assisted electrophoretic deposition using a Laguerre-Gaussian beam for maskless patterning of metal rings and *** are structures of utmost importance,particularly in photonic *** nanoparticles,which are gathered in a colloidal solution by a laser trapping technique,are deposited on a substrate via *** deposition pattern is dependent on the focused spot shape during laser *** intensity distribution of the Laguerre-Gaussian beam is *** with different inner diameters can be fabricated by varying the topological charge of the Laguerre-Gaussian *** equivalent inner diameters of the deposited rings with topological charges of 1,3,and 5 were 0.30,0.78,and 1.45μm,*** inner diameter of the deposited ring with a topological charge of 1 was smaller than the wavelength of the laser beam(532 nm).A tube was also fabricated with a topological charge of 3 by vertical displacement of the deposition *** deposition technology developed here using Laguerre-Gaussian beam will contribute to advancements in the fabrication of photonic and nano-fluidic devices.
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