2D DC Subnormal Glow Discharge in Argon

作     者：A.BOUCHIKHI A.HAMID 

作者机构：University of Saida Faculty of Sciences and Technology Department of Electrical Engineering University of Sciences and Technology of Oran 

出 版 物：《Plasma Science and Technology》 (等离子体科学和技术（英文版）)

年 卷 期：2010年第12卷第1期

页      面：59-66页

核心收录：

学科分类：080901[工学-物理电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0702[理学-物理学] 

主　　题：subnormal glow discharge Boltzmann equation electron temperature Poisson's equation 

摘      要：A two-dimensional time-dependent fluid model was developed and used to describe a DC subnormal glow discharge in argon with Cartesian geometry. This configuration allows us to take into account the transverse expansion of the discharge. A hydrodynamic fluid model used in this paper is based on the moments of the Boltzmann transport equation. The resultant set of governing equations consists of continuity equations （fluxes and densities） for electrons and ions, an energy equation for electrons, and Poisson＇s equation. Simulation results are presented for the densities of charged particles, the electric voltage, the electric field, and the electron temperature of the discharge. The results were compared with those obtained in the literature.