Picosecond burst pulse machining with temporal energy modulation

作     者：Akinao Nakamura Tomoki Mizuta Yasuhiko Shimotsuma Masaaki Sakakura Tomohito Otobe Masahiro Shimizu Kiyotaka Miura 

作者机构：Department of Material Chemistry Graduate School of Engineering Kyoto University National Institutes for Quantum and Radiological Science and Technology Kansai Photon Science Institute 

出 版 物：《Chinese Optics Letters》 (中国光学快报(英文版))

年 卷 期：2020年第18卷第12期

页      面：87-91页

核心收录：

学科分类：080901[工学-物理电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 080401[工学-精密仪器及机械] 0804[工学-仪器科学与技术] 0803[工学-光学工程] 

基　　金：partially supported by JSPS KAKENHI (Nos. JP17H03040 and 20H02656) 

摘      要：Suppression of stress and crack generation during picosecond laser processing in transparent brittle materials such as glass was successfully demonstrated by a picosecond laser pulse with temporal energy modulation. The origin of deterioration in processing accuracy could be interpreted in terms of the discontinuous movement of plasma in the vicinity of the focus. To reveal the effectiveness of the temporal energy modulation for smooth machining, such plasma motion was simulated by the finite-difference time-domain method. Furthermore, photoinduced birefringence was observed using a high-speed polarization camera.