Highly compliant planar Hall effect sensor with sub 200 nT sensitivity

作     者：Pablo Nicolás Granell Guoliang Wang Gilbert Santiago Cañon Bermudez Tobias Kosub Federico Golmar Laura Steren Jürgen Fassbender Denys Makarov 

作者机构：Helmholtz-Zentrum Dresden-Rossendorf e.V.Institute of Ion Beam Physics and Materials ResearchBautzner Landstrasse 40001328 DresdenGermany Instituto Nacional de Tecnología Industrial(INTI)Centro de Micro-y Nanoelectrónica del Bicentenario(CMNB)Av.Gral Paz 5445B1650KNA San MartínBuenos AiresArgentina Escuela de Ciencia y TecnologíaUNSAMCampus MigueleteB1650KNA San MartínBuenos AiresArgentina Consejo Nacional de Investigaciones Científicas y TécnicasC1425FQB Ciudad Autónoma de Buenos AiresArgentina Instituto de Nanociencia y NanotecnologíaB1650KNA San MartínBuenos AiresArgentina Dpto.Materia CondensadaCentro Atómico ConstituyentesB1650 San MartínBuenos AiresArgentina 

出 版 物：《npj Flexible Electronics》 (npj-柔性电子（英文）)

年 卷 期：2019年第3卷第1期

页      面：25-30页

核心收录：

学科分类：0808[工学-电气工程] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 081101[工学-控制理论与控制工程] 0811[工学-控制科学与工程] 081102[工学-检测技术与自动化装置] 0702[理学-物理学] 

基　　金：We thank Bernd Scheumann,Rainer Kaltofen,and Dr.Jens Ingolf Mönch(all HZDR)for the deposition of metal layer stacks.Support by the Structural Characterization Facilities Rossendorf at the Ion Beam Center(IBC)at the HZDR as well as the SEM/FIB characterization facility at the INTI is greatly appreciated.The project is funded in part via the German Academic Exchange Service(DAAD)and the Ministry of Education of Argentina for scholarship“Country-related cooperation programme with Argentina-ALEARG short term scholarship,2017(57352687)” German Research Foundation(DFG)Grant MA 5144/9-1 

主　　题：interactive planar limit 

摘      要：Being a facet of flexible electronics,mechanically reshapeable magnetic field sensorics enable novel device ideas for soft robotics,interactive devices for virtual-and augmented reality and point of care *** applications demand mechanically compliant yet robust sensor devices revealing high sensitivity to small magnetic *** push the detection limit of highly compliant and linear magnetic field sensors to be in the sub-µT range,we explore a new fundamental concept for magnetic field sensing,namely the planar Hall effect in magnetic thin *** their remarkable bendability down to 1 mm,these compliant planar Hall effect sensors allow for an efficient detection of magnetic fields as small as 200 nT with a limit of detection of 20 *** demonstrate the application potential of these devices as a direction(angle)as well as proximity(distance)sensors of tiny magnetic fields emanating from magnetically functionalized *** their intrinsic linearity and simplicity of fabrication,these compliant planar Hall effect sensors have the potential to become a standard solution for low field applications of shapeable magnetoelectronics in point of care applications and on-skin interactive electronics.