Microstructures and Optical Properties of Sol-Gel Derived TiO_2 Anatase Thin Films

作     者：Liu, Zhong-chi Zou, Hua-min Zhong, Jia-cheng Wang, Da-hai 

作者机构：Wuhan Univ Wuhan China 

出 版 物：《Wuhan University Journal of Natural Sciences》 (武汉大学学报（自然科学英文版）)

年 卷 期：1999年第4卷第2期

页      面：48-51页

核心收录：

学科分类：08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 

主　　题：titanium dioxide anatase thin film 

摘      要：TiO 2 anatase thin films on quartz substrates were prepared with sol gel method. The dry gel films, made by spin coating 10 times, were calcined at various temperatures. From X ray diffraction analyses, it is found that the anatase to rutile phase transformation temperature of the films is higher than 850 ℃, the films are preferentially oriented on (0 0 1) plane, i.e. c axis oriented. The thickness, refractive indexes, absorption coefficients and extinction coefficients of the films were determined from UV Vis transmission spectra of the films using a UV Vis spectrophotometer. The thickness of the films is about 570 nm. The refractive indexes, absorption coefficients and the extinction coefficients of the present films are larger than the values of anatase films prepared by sputtering. This indicates that the films made with sol gel method are very dense.