Patternable production of SrTiO_(3) nanoparticles using 1-W laser directly on flexible humidity sensor platform based on ITO/SrTiO_(3)/CNT

作     者：Le Thai Duy Ji-Ye Baek Ye-Ji Mun Hyungtak Seo Le Thai Duy;Ji-Ye Baek;Ye-Ji Mun;Hyungtak Seo

作者机构：Department of Materials Science&EngineeringAjou UniversitySuwon16499South Korea Department of Energy Systems ResearchAjou UniversitySuwon16499South Korea 

出 版 物：《Journal of Materials Science & Technology》 (材料科学技术（英文版）)

年 卷 期：2021年第71卷第12期

页      面：186-194页

核心收录：

学科分类：080901[工学-物理电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 07[理学] 070205[理学-凝聚态物理] 08[工学] 080202[工学-机械电子工程] 080401[工学-精密仪器及机械] 0804[工学-仪器科学与技术] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0802[工学-机械工程] 0803[工学-光学工程] 0702[理学-物理学] 

基　　金：financial support from the National Research Foundation of Korea[NRF–2019R1A2C2003804,2018H1D3A1A02074733,and 2018R1D1A1B07050008]powered by the Ministry of Science and ICT,Republic of Korea supported by Ajou University results of the study on the¨Leaders in Industry-University Cooperation+Project,supported by the Ministry of Education and National Research Foundation of Korea 

主　　题：SrTiO_(3) Nanoparticles Laser annealing Patternable Flexible sensor CNT 

摘      要：Perovskite oxides like S rTiO_(3) at the nanoscale are of interest for eme rging applications,including high-k dielectrics and ***,their synthesis requires long calcination at the elevated temperature,which is a barrier of their application to flexible ***,an effective laser-assisted sol-gel method to patternably produce S rTiO_(3) na noparticles(-100 nm)in selective areas on polyimide substrates(coated with ITO)is ***,the violet-laser power is just 1 W but sufficient to crystallize the material in a short period(a few seconds).Furthermore,developing a flexible device platform using carbon nanotubes(CNT)and SrTiO_(3) nanoparticles for detection of humidity changes at room temperature is *** sensor platform has both capacitive and resistive sensing *** resistive mode with a lower power usage(about 0.2μW)is suitable for long monitoring of humidity in the range of2%RH and *** capacitive mode with higher sensitivity,faster response/recovery time(1-3 min),and lower detection limit(0.5%RH)can be used for calibration *** performance of the flexible sensor is still maintained after 5000 bending cycles at 1.5-cm ***,our synthesis method and the flexible sensor show chances for mass-producing perovskite oxides at low cost for wearable electronics.